Inventor
OUCHI CHIDANE
JP24 patents
⚠️ This page may combine multiple inventors who share the name “OUCHI CHIDANE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
14 patentsUS8009797B2Aug 30, 2011
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program
CANON KK53 citations97
US6661522B2Dec 9, 2003
Interference system and semiconductor exposure apparatus having the same
CANON KK20 citations92
US6322220B1Nov 27, 2001
Exposure apparatus and device manufacturing method using the same
CANON KK20 citations92
US5067811ANov 26, 1991
Illuminance distribution measuring system
CANON KK32 citations92
US7253907B2Aug 7, 2007
Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method
CANON KK7 citations73
US7106452B2Sep 12, 2006
Measuring device and measuring method
CANON KK10 citations73
US6774982B2Aug 10, 2004
Exposure apparatus and device manufacturing method using the same
CANON KK12 citations73
US6721056B1Apr 13, 2004
Surface shape measuring apparatus and method
CANON KK9 citations73
US8537966B2Sep 17, 2013
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program
CANON KK3 citations62
US7952726B2May 31, 2011
Measurement apparatus, exposure apparatus having the same, and device manufacturing method
CANON KK2 citations62
US6853442B2Feb 8, 2005
Projection exposure apparatus and device manufacturing method that change a resonator length of a continuous emission excimer laser
CANON KK2 citations62
US8004691B2Aug 23, 2011
Measuring apparatus, exposure apparatus and method, and device manufacturing method
CANON KK3 citations61
US6961132B2Nov 1, 2005
Interference system and semiconductor exposure apparatus having the same
CANON KK0 citations52
US8351050B2Jan 8, 2013
Wavefront-aberration-measuring device and exposure apparatus
CANON KK0 citations41
OUCHI CHIDANE
7 patentsUS9063055B2Jun 23, 2015
X-ray imaging apparatus
OUCHI CHIDANE35 citations93
US8559594B2Oct 15, 2013
Imaging apparatus and imaging method
OUCHI CHIDANE36 citations93
US9107637B2Aug 18, 2015
X-ray imaging apparatus and wavefront measuring apparatus
OUCHI CHIDANE7 citations83
US9046466B2Jun 2, 2015
X-ray imaging apparatus
OUCHI CHIDANE7 citations83
US8995613B2Mar 31, 2015
X-ray imaging apparatus
OUCHI CHIDANE8 citations83
US8340243B2Dec 25, 2012
X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program
OUCHI CHIDANE4 citations73
US8077391B2Dec 13, 2011
Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method
OUCHI CHIDANE1 citations51