Inventor

MOON YONGSIK

US7 patents

⚠️ This page may combine multiple inventors who share the name “MOON YONGSIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US6790768B2Sep 14, 2004

Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects

APPLIED MATERIALS INC13 citations92

US7070480B2Jul 4, 2006

Method and apparatus for polishing substrates

APPLIED MATERIALS INC24 citations91

US6960521B2Nov 1, 2005

Method and apparatus for polishing metal and dielectric substrates

APPLIED MATERIALS INC6 citations73

GLOBALFOUNDRIES INC

1 patent

US9153693B2Oct 6, 2015

FinFET gate with insulated vias and method of making same

GLOBALFOUNDRIES INC9 citations83

DUBOUST ALAIN

1 patent

US8066552B2Nov 29, 2011

Multi-layer polishing pad for low-pressure polishing

DUBOUST ALAIN10 citations82

YU HONG

1 patent

US8962407B2Feb 24, 2015

Method and device to achieve self-stop and precise gate height

YU HONG0 citations48

CHOI JIHONG

1 patent

US8241927B2Aug 14, 2012

Methods relating to capacitive monitoring of layer characteristics during back end-of the-line processing

CHOI JIHONG1 citations47