Inventor

CHAPLICK VICTORIA M

US4 patents

⚠️ This page may combine multiple inventors who share the name “CHAPLICK VICTORIA M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MILLMAN JR RONALD P

2 patents

US8415587B2Apr 9, 2013

Fiber-optic beam delivery system for wafer edge processing

MILLMAN JR RONALD P339 citations96

US8410394B2Apr 2, 2013

Method and apparatus for processing substrate edges

MILLMAN JR RONALD P8 citations80

HARTE KENNETH J

2 patents

US8658937B2Feb 25, 2014

Method and apparatus for processing substrate edges

HARTE KENNETH J16 citations79

US8183500B2May 22, 2012

Orthogonal beam delivery system for wafer edge processing

HARTE KENNETH J2 citations59