Inventor
DYER TIMOTHY S
US22 patents
⚠️ This page may combine multiple inventors who share the name “DYER TIMOTHY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
14 patentsUS6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US7193228B2Mar 20, 2007
EUV light source optical elements
CYMER INC38 citations91
US7366219B2Apr 29, 2008
Line narrowing module
CYMER INC20 citations90
US6690706B2Feb 10, 2004
High rep-rate laser with improved electrodes
CYMER INC17 citations83
US7522650B2Apr 21, 2009
Gas discharge laser chamber improvements
CYMER INC8 citations82
US6937635B2Aug 30, 2005
High rep-rate laser with improved electrodes
CYMER INC7 citations71
US6661826B2Dec 9, 2003
Laser chamber insulator with sealed electrode feedthrough
CYMER INC11 citations70
US7095774B2Aug 22, 2006
Cathodes for fluorine gas discharge lasers
CYMER INC3 citations63
US7339973B2Mar 4, 2008
Electrodes for fluorine gas discharge lasers
CYMER INC2 citations61
US7301980B2Nov 27, 2007
Halogen gas discharge laser electrodes
CYMER INC5 citations61
US7132123B2Nov 7, 2006
High rep-rate laser with improved electrodes
CYMER INC3 citations60
US7851011B2Dec 14, 2010
Anodes for fluorine gas discharge lasers
CYMER INC0 citations52
US7230965B2Jun 12, 2007
Anodes for fluorine gas discharge lasers
CYMER INC1 citations52
SPEEDFAM IPEC CORP
8 patentsUS6447368B1Sep 10, 2002
Carriers with concentric balloons supporting a diaphragm
SPEEDFAM IPEC CORP62 citations95
US6793565B1Sep 21, 2004
Orbiting indexable belt polishing station for chemical mechanical polishing
SPEEDFAM IPEC CORP23 citations92
US6540592B1Apr 1, 2003
Carrier head with reduced moment wear ring
SPEEDFAM IPEC CORP29 citations92
US6288357B1Sep 11, 2001
Ion milling planarization of semiconductor workpieces
SPEEDFAM IPEC CORP47 citations92
US6409580B1Jun 25, 2002
Rigid polishing pad conditioner for chemical mechanical polishing tool
SPEEDFAM IPEC CORP38 citations89
US6652366B2Nov 25, 2003
Dynamic slurry distribution control for CMP
SPEEDFAM IPEC CORP15 citations84
US6203417B1Mar 20, 2001
Chemical mechanical polishing tool components with improved corrosion resistance
SPEEDFAM IPEC CORP10 citations72
US7229343B2Jun 12, 2007
Orbiting indexable belt polishing station for chemical mechanical polishing
SPEEDFAM IPEC CORP0 citations52