Inventor
SIMON DANIEL A
US3 patents
Patents
3 patentsUS9893167B2Feb 13, 2018
Integration methods to fabricate internal spacers for nanowire devices
INTEL CORP9 citations82
US9508796B2Nov 29, 2016
Internal spacers for nanowire transistors and method of fabrication thereof
INTEL CORP9 citations82
US9935205B2Apr 3, 2018
Internal spacers for nanowire transistors and method of fabrication thereof
INTEL CORP3 citations71