Inventor
PEETERS FELIX GODFRIED PETER
NL19 patents
⚠️ This page may combine multiple inventors who share the name “PEETERS FELIX GODFRIED PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS7898642B2Mar 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations92
US10234768B2Mar 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US9829799B2Nov 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US7248339B2Jul 24, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7423730B2Sep 9, 2008
Lithographic apparatus
ASML NETHERLANDS BV4 citations60
US10705432B2Jul 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9989861B2Jun 5, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9568840B2Feb 14, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9207543B2Dec 8, 2015
Lithographic apparatus and device manufacturing method involving a groove to collect liquid
ASML NETHERLANDS BV0 citations52
US7884920B2Feb 8, 2011
Lithographic apparatus and pivotable structure assembly
ASML NETHERLANDS BV1 citations48
US7612867B2Nov 3, 2009
Lithographic apparatus
ASML NETHERLANDS BV0 citations48
PEETERS FELIX GODFRIED PETER
2 patentsKOLESNYCHENKO ALEKSEY YURIEVICH
2 patentsUS8755033B2Jun 17, 2014
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid
KOLESNYCHENKO ALEKSEY YURIEVICH0 citations50
US8704998B2Apr 22, 2014
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid
KOLESNYCHENKO ALEKSEY YURIEVICH0 citations50