Inventor
VAN DEN HEUVEL MARCO ADRIANUS PETER
NL7 patents
⚠️ This page may combine multiple inventors who share the name “VAN DEN HEUVEL MARCO ADRIANUS PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS9835957B2Dec 5, 2017
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations67
US8384882B2Feb 26, 2013
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate
ASML NETHERLANDS BV4 citations61
US11846879B2Dec 19, 2023
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
US11500296B2Nov 15, 2022
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
US11175594B2Nov 16, 2021
Method of unloading an object from a support table
ASML NETHERLANDS BV0 citations59
US10656536B2May 19, 2020
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37