Inventor

PIEHLER STEFAN

DE5 patents

⚠️ This page may combine multiple inventors who share the name “PIEHLER STEFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV STUTTGART

2 patents

US10488250B2Nov 26, 2019

Method and device for quantitatively sensing the power fraction of a radiation background of a pulsed laser

UNIV STUTTGART0 citations38

US10574024B2Feb 25, 2020

Optical module, laser amplifier system, method and use

UNIV STUTTGART0 citations36

TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MFG GMBH

1 patent

US12598688B2Apr 7, 2026

EUV excitation light source and euv light source

TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MFG GMBH0 citations47

TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH

1 patent

US11968767B2Apr 23, 2024

EUV light source with a separation device

TRUMPF LASERSYSTEMS SEMICONDUCTOR MFG GMBH0 citations39

ASML NETHERLANDS BV

1 patent

US12007693B2Jun 11, 2024

Laser focussing module

ASML NETHERLANDS BV0 citations38