Inventor
NAKATSUKA SHIGERU
JP3 patents
Patents
3 patentsUS11598005B2Mar 7, 2023
Deposition apparatus including an off-axis lift-and-rotation unit and methods for operating the same
SANDISK TECHNOLOGIES LLC1 citations60
US11551961B2Jan 10, 2023
Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
SANDISK TECHNOLOGIES LLC0 citations49
US11538708B2Dec 27, 2022
Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
SANDISK TECHNOLOGIES LLC0 citations49