Inventor
FUKATA SYO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “FUKATA SYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SANDISK TECHNOLOGIES LLC
6 patentsUS9978768B2May 22, 2018
Method of making three-dimensional semiconductor memory device having laterally undulating memory films
SANDISK TECHNOLOGIES LLC9 citations82
US11935784B2Mar 19, 2024
Three-dimensional memory device containing self-aligned bit line contacts and methods for forming the same
SANDISK TECHNOLOGIES LLC4 citations73
US10847376B2Nov 24, 2020
In-situ deposition and etch process and apparatus for precision patterning of semiconductor devices
SANDISK TECHNOLOGIES LLC4 citations70
US11598005B2Mar 7, 2023
Deposition apparatus including an off-axis lift-and-rotation unit and methods for operating the same
SANDISK TECHNOLOGIES LLC1 citations60
US11551961B2Jan 10, 2023
Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
SANDISK TECHNOLOGIES LLC0 citations49
US11538708B2Dec 27, 2022
Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same
SANDISK TECHNOLOGIES LLC0 citations49