Inventor
BONKASS MATTHIAS
DE2 patents
Patents
2 patentsUS6974530B2Dec 13, 2005
Method and system for controlling ion distribution during plating of a metal on a workpiece surface
ADVANCED MICRO DEVICES INC13 citations79
US7560381B2Jul 14, 2009
Technique for metal deposition by electroless plating using an activation scheme including a substrate heating process
ADVANCED MICRO DEVICES INC1 citations48