Inventor
KE YU-LUN
TW8 patents
Patents
8 patentsUS10504738B2Dec 10, 2019
Focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US12080547B2Sep 3, 2024
Interconnect system with improved low-K dielectrics
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12165851B2Dec 10, 2024
Plasma processing method for manufacturing semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11227747B2Jan 18, 2022
Etch process with rotatable shower head
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11043373B2Jun 22, 2021
Interconnect system with improved low-k dielectrics
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10529543B2Jan 7, 2020
Etch process with rotatable shower head
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11854873B2Dec 26, 2023
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11075087B2Jul 27, 2021
Focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61