Inventor
KURIHARA MASA-AKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KURIHARA MASA-AKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
3 patentsUS6801295B2Oct 5, 2004
Post exposure modification of critical dimensions in mask fabrication
INTEL CORP5 citations69
US7045260B2May 16, 2006
Post exposure modification of critical dimensions in mask fabrication
INTEL CORP2 citations59
US7045259B2May 16, 2006
Post exposure modification of critical dimensions in mask fabrication
INTEL CORP0 citations49