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Inventor
THOMSON MARISTE A
US
3 patents
⚠️ This page may combine multiple inventors who share the name “THOMSON MARISTE A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
XINIX INC
2 patents
US5292605A
Mar 8, 1994
Method for control of photoresist develop processes
XINIX INC
84 citations
92
US5196285A
Mar 23, 1993
Method for control of photoresist develop processes
XINIX INC
62 citations
92
LUXTRON CORP
1 patent
US5190614A
Mar 2, 1993
Method of endpoint detection and structure therefor
LUXTRON CORP
41 citations
88