Inventor
BORIONETTI GABRIELLA
US3 patents
Patents
3 patentsUS7485928B2Feb 3, 2009
Arsenic and phosphorus doped silicon wafer substrates having intrinsic gettering
MEMC ELECTRONIC MATERIALS20 citations90
US5418172AMay 23, 1995
Method for detecting sources of contamination in silicon using a contamination monitor wafer
MEMC ELECTRONIC MATERIALS24 citations90
US8026145B2Sep 27, 2011
Arsenic and phosphorus doped silicon wafer substrates having intrinsic gettering
MEMC ELECTRONIC MATERIALS10 citations82