Inventor
KNOOT PETER A
US7 patents
Patents
7 patentsUS6037273AMar 14, 2000
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC139 citations97
US6187133B1Feb 13, 2001
Gas manifold for uniform gas distribution and photochemistry
APPLIED MATERIALS INC47 citations94
US6130415AOct 10, 2000
Low temperature control of rapid thermal processes
APPLIED MATERIALS INC56 citations94
US6410456B1Jun 25, 2002
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC25 citations92
US6164816ADec 26, 2000
Tuning a substrate temperature measurement system
APPLIED MATERIALS INC53 citations92
US6159866ADec 12, 2000
Method for insitu vapor generation for forming an oxide on a substrate
APPLIED MATERIALS INC35 citations92
US6395643B1May 28, 2002
Gas manifold for uniform gas distribution and photochemistry
APPLIED MATERIALS INC7 citations72