Inventor
XING GUANGCAI
US7 patents
⚠️ This page may combine multiple inventors who share the name “XING GUANGCAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6037273AMar 14, 2000
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC139 citations97
US6450116B1Sep 17, 2002
Apparatus for exposing a substrate to plasma radicals
APPLIED MATERIALS INC114 citations94
US6114258ASep 5, 2000
Method of oxidizing a substrate in the presence of nitride and oxynitride films
APPLIED MATERIALS INC95 citations94
US6410456B1Jun 25, 2002
Method and apparatus for insitu vapor generation
APPLIED MATERIALS INC25 citations92
US6159866ADec 12, 2000
Method for insitu vapor generation for forming an oxide on a substrate
APPLIED MATERIALS INC35 citations92
US7341907B2Mar 11, 2008
Single wafer thermal CVD processes for hemispherical grained silicon and nano-crystalline grain-sized polysilicon
APPLIED MATERIALS INC16 citations81