Inventor
BINNARD MIKE
US13 patents
Patents
13 patentsUS6304320B1Oct 16, 2001
Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same
NIKON CORP65 citations94
US6885430B2Apr 26, 2005
System and method for resetting a reaction mass assembly of a stage assembly
NIKON CORP43 citations92
US6842248B1Jan 11, 2005
System and method for calibrating mirrors of a stage assembly
NIKON CORP25 citations92
US6731372B2May 4, 2004
Multiple chamber fluid mount
NIKON CORP24 citations92
US6603531B1Aug 5, 2003
Stage assembly including a reaction assembly that is connected by actuators
NIKON CORP39 citations92
US6408767B1Jun 25, 2002
Low stiffness suspension for a stage
NIKON CORP45 citations92
US6313550B1Nov 6, 2001
Coil mounting and cooling system for an electric motor
NIKON CORP40 citations92
US6958808B2Oct 25, 2005
System and method for resetting a reaction mass assembly of a stage assembly
NIKON CORP15 citations84
US6888620B2May 3, 2005
System and method for holding a device with minimal deformation
NIKON CORP14 citations84
US6757053B1Jun 29, 2004
Stage assembly including a reaction mass assembly
NIKON CORP15 citations84
US6593997B1Jul 15, 2003
Stage assembly including a reaction assembly
NIKON CORP17 citations82
US7221433B2May 22, 2007
Stage assembly including a reaction assembly having a connector assembly
NIKON CORP8 citations73
US6882126B2Apr 19, 2005
Holder mover for a stage assembly
NIKON CORP6 citations63