Inventor
CHECHIK NINA G
US10 patents
Patents
10 patentsUS6069080AMay 30, 2000
Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like
RODEL INC126 citations97
US6488570B1Dec 3, 2002
Method relating to a polishing system having a multi-phase polishing layer
RODEL INC68 citations96
US6375559B1Apr 23, 2002
Polishing system having a multi-phase polishing substrate and methods relating thereto
RODEL INC61 citations96
US6210254B1Apr 3, 2001
Method of manufacturing a polymeric polishing pad having photolithographically induced surface pattern(s)
RODEL INC45 citations96
US6099394AAug 8, 2000
Polishing system having a multi-phase polishing substrate and methods relating thereto
RODEL INC82 citations96
US6036579AMar 14, 2000
Polymeric polishing pad having photolithographically induced surface patterns(s) and methods relating thereto
RODEL INC82 citations96
US6337281B1Jan 8, 2002
Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like
RODEL INC44 citations92
US6284114B1Sep 4, 2001
Method of fabricating a porous polymeric material by electrophoretic deposition
RODEL INC28 citations92
US6245679B1Jun 12, 2001
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers
RODEL INC13 citations74
US6210525B1Apr 3, 2001
Apparatus and methods for chemical-mechanical polishing of semiconductor wafers
RODEL INC14 citations74