Inventor

TOYAMA NAOTAKA

JP4 patents

⚠️ This page may combine multiple inventors who share the name “TOYAMA NAOTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHINETSU HANDOTAI KK

3 patents

US6422922B1Jul 23, 2002

Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpiece

SHINETSU HANDOTAI KK18 citations91

US6386957B1May 14, 2002

Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus

SHINETSU HANDOTAI KK17 citations83

US6558233B1May 6, 2003

Wafer polishing method, wafer cleaning method and wafer protective film

SHINETSU HANDOTAI KK7 citations71

KANAYA KOICHI

1 patent

US8287331B2Oct 16, 2012

Method for manufacturing polishing pad, and method for polishing wafer

KANAYA KOICHI0 citations40