Inventor
BAN MIKICHI
JP22 patents
Patents
22 patentsUS6012966AJan 11, 2000
Precision polishing apparatus with detecting means
CANON KK118 citations99
US6004187ADec 21, 1999
Method and apparatus for measuring film thickness and film thickness distribution during polishing
CANON KK115 citations97
US6142855ANov 7, 2000
Polishing apparatus and polishing method
CANON KK67 citations96
US4294538AOct 13, 1981
Image forming optical system
CANON KK61 citations96
US5087121AFeb 11, 1992
Depth/height measuring device
CANON KK84 citations95
US6776691B2Aug 17, 2004
Polishing/cleaning method as well as method of making a wiring section using a polishing apparatus
CANON KK26 citations92
US6551172B1Apr 22, 2003
Polishing apparatus and polishing method
CANON KK19 citations92
US6503361B1Jan 7, 2003
Polishing method and polishing apparatus using the same
CANON KK34 citations92
US6332835B1Dec 25, 2001
Polishing apparatus with transfer arm for moving polished object without drying it
CANON KK40 citations92
US6165050ADec 26, 2000
Method of manufacturing semiconductor device using precision polishing apparatus with detecting means
CANON KK22 citations92
US6149500ANov 21, 2000
Precision polishing method using hermetically sealed chambers
CANON KK18 citations92
US6137575AOct 24, 2000
Film thickness measuring method and apparatus
CANON KK35 citations92
US6093081AJul 25, 2000
Polishing method and polishing apparatus using the same
CANON KK27 citations92
US5904611AMay 18, 1999
Precision polishing apparatus
CANON KK20 citations92
US4711576ADec 8, 1987
Wave front aberration measuring apparatus
CANON KK40 citations92
US4322130AMar 30, 1982
Phase shifting mirror
CANON KK46 citations92
US4850709AJul 25, 1989
Fabri-perot spectroscopy method and apparatus utilizing the same
CANON KK33 citations91
US6038068AMar 14, 2000
Aberration correction system and astronomical telescope having the same
CANON KK24 citations88
US4787749ANov 29, 1988
Method and apparatus for measuring the thickness of a thin film using the spectral reflection factor of the film
CANON KK23 citations80
US4389084AJun 21, 1983
Observing apparatus
CANON KK7 citations74
US6629882B2Oct 7, 2003
Precise polishing apparatus and method
CANON KK6 citations73
US6390903B1May 21, 2002
Precise polishing apparatus and method
CANON KK13 citations73