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Inventor
POOLE KELVIN F
US
2 patents
Patents
2 patents
US5822218A
Oct 13, 1998
Systems, methods and computer program products for prediction of defect-related failures in integrated circuits
UNIV CLEMSON
221 citations
95
US6569249B1
May 27, 2003
Process for forming layers on substrates
UNIV CLEMSON
19 citations
90