Inventor
YOO MING-HWA
TW6 patents
Patents
6 patentsUS6479098B1Nov 12, 2002
Method to solve particle performance of FSG layer by using UFU season film for FSG process
TAIWAN SEMICONDUCTOR MFG20 citations92
US6759347B1Jul 6, 2004
Method of forming in-situ SRO HDP-CVD barrier film
TAIWAN SEMICONDUCTOR MFG20 citations89
US6815007B1Nov 9, 2004
Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film
TAIWAN SEMICONDUCTOR MFG14 citations83
US6703317B1Mar 9, 2004
Method to neutralize charge imbalance following a wafer cleaning process
TAIWAN SEMICONDUCTOR MFG14 citations80
US6815072B2Nov 9, 2004
Method to solve particle performance of FSG layer by using UFU season film for FSG process
TAIWAN SEMICONDUCTOR MFG2 citations62
US6602560B2Aug 5, 2003
Method for removing residual fluorine in HDP-CVD chamber
TAIWAN SEMICONDUCTOR MFG2 citations58