Inventor
WANG YING-LUNG
TW5 patents
Patents
5 patentsUS7176571B2Feb 13, 2007
Nitride barrier layer to prevent metal (Cu) leakage issue in a dual damascene structure
TAIWAN SEMICONDUCTOR MFG19 citations91
US6759347B1Jul 6, 2004
Method of forming in-situ SRO HDP-CVD barrier film
TAIWAN SEMICONDUCTOR MFG20 citations89
US6703317B1Mar 9, 2004
Method to neutralize charge imbalance following a wafer cleaning process
TAIWAN SEMICONDUCTOR MFG14 citations80
US7296532B2Nov 20, 2007
Bypass gas feed system and method to improve reactant gas flow and film deposition
TAIWAN SEMICONDUCTOR MFG18 citations78
US6979656B2Dec 27, 2005
Carbon and halogen doped silicate glass dielectric layer and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG0 citations52