Inventor
KREMER ALEXANDER
US10 patents
⚠️ This page may combine multiple inventors who share the name “KREMER ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
6 patentsUS6801299B2Oct 5, 2004
System for laser beam expansion without expanding spatial coherence
ASML HOLDING NV31 citations87
US7173688B2Feb 6, 2007
Method for calculating an intensity integral for use in lithography systems
ASML HOLDING NV12 citations81
US12124172B2Oct 22, 2024
Lithographic apparatus and ultraviolet radiation control system
ASML HOLDING NV0 citations60
US7333176B2Feb 19, 2008
De-focus uniformity correction
ASML HOLDING NV3 citations60
US7843549B2Nov 30, 2010
Light attenuating filter for correcting field dependent ellipticity and uniformity
ASML HOLDING NV0 citations50
US7027129B2Apr 11, 2006
System for laser beam expansion without expanding spatial coherence
ASML HOLDING NV0 citations46