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Inventor
ONODERA NAOMI
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “ONODERA NAOMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONODERA NAOMI
1 patent
US8683943B2
Apr 1, 2014
Plasma process apparatus and plasma process method
ONODERA NAOMI
553 citations
94
KADOBE MASATO
1 patent
US9039411B2
May 26, 2015
Thermal treatment apparatus
KADOBE MASATO
4 citations
65
TOKYO ELECTRON LTD
1 patent
US9447926B2
Sep 20, 2016
Plasma process method
TOKYO ELECTRON LTD
1 citations
49