P

Inventor

GOKON KIYOHIKO

JP4 patents
⚠️ This page may combine multiple inventors who share the name “GOKON KIYOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US12557593B2Feb 17, 2026

Substrate processing apparatus

TOKYO ELECTRON LTD0 citations49
US9447926B2Sep 20, 2016

Plasma process method

TOKYO ELECTRON LTD1 citations49
US10134578B2Nov 20, 2018

Housing and substrate processing apparatus including the same

TOKYO ELECTRON LTD0 citations36

ONODERA NAOMI

1 patent
US8683943B2Apr 1, 2014

Plasma process apparatus and plasma process method

ONODERA NAOMI553 citations94