P

Inventor

SAIDIN ZAIN

US6 patents
⚠️ This page may combine multiple inventors who share the name “SAIDIN ZAIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents
US6076465AJun 20, 2000

System and method for determining reticle defect printability

KLA TENCOR CORP113 citations95
US6381358B1Apr 30, 2002

System and method for determining reticle defect printability

KLA TENCOR CORP15 citations81
US6731787B1May 4, 2004

System and method for determining reticle defect printability

KLA TENCOR CORP9 citations71

TERADYNE INC

1 patent
US5023528AJun 11, 1991

Method of three-phase winding motor control of rotary motor-driven linear actuators, linear motor-actuated carriages, and similar systems, and apparatus for practicing the same

TERADYNE INC28 citations91

FOUQUET CHRISTOPHE

1 patent
US9710903B2Jul 18, 2017

System and method for detecting design and process defects on a wafer using process monitoring features

FOUQUET CHRISTOPHE10 citations77

CHOI DONGSUB

1 patent
US8804137B2Aug 12, 2014

Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability

CHOI DONGSUB4 citations71