Inventor
ULLAL SAURABH J
US11 patents
⚠️ This page may combine multiple inventors who share the name “ULLAL SAURABH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS7204913B1Apr 17, 2007
In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control
LAM RES CORP92 citations96
US7767584B1Aug 3, 2010
In-situ pre-coating of plasma etch chamber for improved productivity and chamber condition control
LAM RES CORP45 citations95
US7939778B2May 10, 2011
Plasma processing chamber with guard ring for upper electrode assembly
LAM RES CORP27 citations92
US7482550B2Jan 27, 2009
Quartz guard ring
LAM RES CORP18 citations92
US6994769B2Feb 7, 2006
In-situ cleaning of a polymer coated plasma processing chamber
LAM RES CORP25 citations92
US6776851B1Aug 17, 2004
In-situ cleaning of a polymer coated plasma processing chamber
LAM RES CORP49 citations92
US7854820B2Dec 21, 2010
Upper electrode backing member with particle reducing features
LAM RES CORP38 citations91
US9093483B2Jul 28, 2015
Showerhead electrode assembly with gas flow modification for extended electrode life
LAM RES CORP0 citations51