Inventor
SMITS MARC
NL12 patents
⚠️ This page may combine multiple inventors who share the name “SMITS MARC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS10987705B2Apr 27, 2021
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV4 citations81
US10632509B2Apr 28, 2020
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV4 citations81
US11738376B2Aug 29, 2023
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV2 citations70
US12202019B2Jan 21, 2025
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV0 citations60
US11599028B2Mar 7, 2023
Methods and systems for clamping a substrate
ASML NETHERLANDS BV0 citations60
US12476075B2Nov 18, 2025
Stack alignment techniques
ASML NETHERLANDS BV0 citations51
US11961698B2Apr 16, 2024
Replaceable module for a charged particle apparatus
ASML NETHERLANDS BV0 citations44
MAPPER LITHOGRAPHY IP BV
5 patentsUS9981293B2May 29, 2018
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
MAPPER LITHOGRAPHY IP BV9 citations81
US9224580B2Dec 29, 2015
Plasma generator
MAPPER LITHOGRAPHY IP BV4 citations70
US9484187B2Nov 1, 2016
Arrangement for transporting radicals
MAPPER LITHOGRAPHY IP BV0 citations51
US9123507B2Sep 1, 2015
Arrangement and method for transporting radicals
MAPPER LITHOGRAPHY IP BV0 citations51
US9506881B2Nov 29, 2016
Method and apparatus for predicting a growth rate of deposited contaminants
MAPPER LITHOGRAPHY IP BV0 citations39