Inventor
LODEWIJK CHRIS FRANCISCUS JESSICA
NL6 patents
⚠️ This page may combine multiple inventors who share the name “LODEWIJK CHRIS FRANCISCUS JESSICA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS10987705B2Apr 27, 2021
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV4 citations81
US10632509B2Apr 28, 2020
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV4 citations81
US11738376B2Aug 29, 2023
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV2 citations70
US12202019B2Jan 21, 2025
Method and system for the removal and/or avoidance of contamination in charged particle beam systems
ASML NETHERLANDS BV0 citations60