Inventor
MIZUGUCHI YASUHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “MIZUGUCHI YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
8 patentsUS10651068B1May 12, 2020
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state
KOKUSAI ELECTRIC CORP1 citations72
US12165894B2Dec 10, 2024
Processing method, method of manufacturing semiconductor, and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
US11749550B2Sep 5, 2023
Method of manufacturing semiconductor device by setting process chamber maintenance enable state
KOKUSAI ELECTRIC CORP0 citations62
US11355372B2Jun 7, 2022
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state
KOKUSAI ELECTRIC CORP0 citations62
US11342212B2May 24, 2022
Method of manufacturing semiconductor device by setting process chamber maintenance enable state
KOKUSAI ELECTRIC CORP0 citations62
US10930533B2Feb 23, 2021
Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US10984991B2Apr 20, 2021
Substrate processing apparatus
KOKUSAI ELECTRIC CORP1 citations61
US11422528B2Aug 23, 2022
Substrate processing system, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations51
HITACHI INT ELECTRIC INC
4 patentsUS10134587B1Nov 20, 2018
Method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC3 citations70
US9875920B1Jan 23, 2018
Substrate processing apparatus
HITACHI INT ELECTRIC INC3 citations70
US9244447B2Jan 26, 2016
Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium, and substrate transfer method
HITACHI INT ELECTRIC INC3 citations70
US10290516B2May 14, 2019
Substrate processing apparatus, maintenance method, and maintenance program
HITACHI INT ELECTRIC INC1 citations60