Inventor
LEE SHENG-WEI
TW12 patents
⚠️ This page may combine multiple inventors who share the name “LEE SHENG-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS9870896B2Jan 16, 2018
System and method for controlling ion implanter
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US9786470B2Oct 10, 2017
Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9606181B2Mar 28, 2017
Processing apparatus, ion implantation apparatus and ion implantation method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9679746B2Jun 13, 2017
Ion implantation tool and ion implantation method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10121637B2Nov 6, 2018
Multi-platen ion implanter and method for implanting multiple substrates simultaneously
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
IND TECH RES INST
3 patentsUS7202512B2Apr 10, 2007
Construction of thin strain-relaxed SiGe layers and method for fabricating the same
IND TECH RES INST417 citations97
US7498224B2Mar 3, 2009
Strained silicon forming method with reduction of threading dislocation density
IND TECH RES INST1 citations51
US7102153B2Sep 5, 2006
Strained silicon forming method with reduction of threading dislocation density
IND TECH RES INST0 citations51