Inventor
MIYAHARU TAKAFUMI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MIYAHARU TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
17 patentsUS12153343B2Nov 26, 2024
Imprint method, imprint apparatus, and article manufacturing method
CANON KK2 citations72
US10761316B2Sep 1, 2020
Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article
CANON KK2 citations72
US11656547B2May 23, 2023
Imprint apparatus, imprinting method, and product manufacturing method
CANON KK2 citations71
US10754255B2Aug 25, 2020
Exposure apparatus and article manufacturing method
CANON KK2 citations71
US10634995B2Apr 28, 2020
Position detector, position detection method, imprint apparatus, and product manufacturing method
CANON KK3 citations71
US11204548B2Dec 21, 2021
Imprint apparatus, imprinting method, and method for manufacturing article
CANON KK0 citations62
US12072638B2Aug 27, 2024
Exposure apparatus, exposure method, and method of manufacturing article
CANON KK1 citations61
US11835869B2Dec 5, 2023
Exposure apparatus, exposure method, and method of manufacturing article
CANON KK0 citations61
US12326668B2Jun 10, 2025
Detection apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations51
US9594315B2Mar 14, 2017
Detection apparatus, lithography apparatus and method of manufacturing article
CANON KK0 citations51
US9595447B2Mar 14, 2017
Detection apparatus, imprint apparatus, and method of manufacturing products
CANON KK1 citations51
US7671967B2Mar 2, 2010
Exposure apparatus and exposure method
CANON KK1 citations51
US12429795B2Sep 30, 2025
Detection apparatus, lithography apparatus, and article manufacturing method
CANON KK0 citations50
US10386737B2Aug 20, 2019
Imprint apparatus and method for producing article
CANON KK0 citations50
US8013976B2Sep 6, 2011
Exposure apparatus, exposure method, and device fabrication method
CANON KK1 citations50
US12023850B2Jul 2, 2024
Position detection apparatus, imprint apparatus, and article manufacturing method
CANON KK0 citations47
US10642171B2May 5, 2020
Imprint apparatus, imprint method, and method for producing article
CANON KK0 citations42