Inventor
SMEETS BART
BE7 patents
Patents
7 patentsUS9817320B2Nov 14, 2017
Lithographic method and apparatus
ASML NETHERLANDS BV2 citations68
US10996567B2May 4, 2021
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations65
US10001712B2Jun 19, 2018
Immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US11474436B2Oct 18, 2022
Tuning patterning apparatus based on optical characteristic
ASML NETHERLANDS BV0 citations50
US10139735B2Nov 27, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV1 citations49
US10175586B2Jan 8, 2019
Lithographic method and apparatus
ASML NETHERLANDS BV0 citations48
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40