Inventor
SHAPIRO MICHAEL
US13 patents
⚠️ This page may combine multiple inventors who share the name “SHAPIRO MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS5563105AOct 8, 1996
PECVD method of depositing fluorine doped oxide using a fluorine precursor containing a glass-forming element
IBM332 citations99
US5643640AJul 1, 1997
Fluorine doped plasma enhanced phospho-silicate glass, and process
IBM20 citations88
US11175978B2Nov 16, 2021
Detection of an error generated within an electronic device
IBM0 citations51