Inventor
BERGOËND ISABELLE
FR2 patents
Patents
2 patentsUS11906302B2Feb 20, 2024
Method and system for measuring a surface of an object comprising different structures using low coherence interferometry
UNITY SEMICONDUCTOR0 citations52
US11713960B2Aug 1, 2023
Method and system for measuring a surface of an object comprising different structures using low coherence interferometry
UNITY SEMICONDUCTOR1 citations52