Inventor
MORIKAWA YASUHIRO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “MORIKAWA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
7 patentsUS7728252B2Jun 1, 2010
Etching method and system
ULVAC INC12 citations83
US12469711B2Nov 11, 2025
Etching method
ULVAC INC0 citations60
US12020942B2Jun 25, 2024
Etching method
ULVAC INC0 citations60
US11510320B2Nov 22, 2022
Method of processing wiring substrate
ULVAC INC0 citations59
US12205795B2Jan 21, 2025
Plasma processing device
ULVAC INC0 citations49
US12217969B2Feb 4, 2025
Silicon dry etching method
ULVAC INC0 citations45
US10079133B2Sep 18, 2018
Plasma processing device
ULVAC INC0 citations28
ASICS CORP
3 patentsMATSUSHITA ELECTRIC INDUSTRIAL CO LTD
2 patentsUS6828247B2Dec 7, 2004
Method for etching organic film, method for fabricating semiconductor device and pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations73
US6451620B2Sep 17, 2002
Method for etching organic film, method for fabricating semiconductor device and pattern formation method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD6 citations73