Inventor
SPINNER CHARLES R
US4 patents
Patents
4 patentsUS5462894AOct 31, 1995
Method for fabricating a polycrystalline silicon resistive load element in an integrated circuit
SGS THOMSON MICROELECTRONICS37 citations91
US5070391ADec 3, 1991
Semiconductor contact via structure and method
SGS THOMSON MICROELECTRONICS31 citations91
US5059554AOct 22, 1991
Method for forming polycrystalline silicon contacts
SGS THOMSON MICROELECTRONICS56 citations91
US5146309ASep 8, 1992
Method for forming polycrystalline silicon contacts
SGS THOMSON MICROELECTRONICS9 citations73