Inventor
RATHMELL ROBERT D
US17 patents
⚠️ This page may combine multiple inventors who share the name “RATHMELL ROBERT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
14 patentsUS6777696B1Aug 17, 2004
Deflecting acceleration/deceleration gap
AXCELIS TECH INC71 citations97
US6881966B2Apr 19, 2005
Hybrid magnetic/electrostatic deflector for ion implantation systems
AXCELIS TECH INC35 citations92
US6534775B1Mar 18, 2003
Electrostatic trap for particles entrained in an ion beam
AXCELIS TECH INC30 citations91
US6476399B1Nov 5, 2002
System and method for removing contaminant particles relative to an ion beam
AXCELIS TECH INC23 citations91
US7022984B1Apr 4, 2006
Biased electrostatic deflector
AXCELIS TECH INC43 citations90
US7615763B2Nov 10, 2009
System for magnetic scanning and correction of an ion beam
AXCELIS TECH INC16 citations84
US7361914B2Apr 22, 2008
Means to establish orientation of ion beam to wafer and correct angle errors
AXCELIS TECH INC15 citations84
US6774377B1Aug 10, 2004
Electrostatic parallelizing lens for ion beams
AXCELIS TECH INC19 citations84
US6989545B1Jan 24, 2006
Device and method for measurement of beam angle and divergence
AXCELIS TECH INC13 citations83
US7982195B2Jul 19, 2011
Controlled dose ion implantation
AXCELIS TECH INC9 citations82
US7329882B2Feb 12, 2008
Ion implantation beam angle calibration
AXCELIS TECH INC16 citations77
US7112809B2Sep 26, 2006
Electrostatic lens for ion beams
AXCELIS TECH INC10 citations74
US7102146B2Sep 5, 2006
Dose cup located near bend in final energy filter of serial implanter for closed loop dose control
AXCELIS TECH INC4 citations62
US7361915B2Apr 22, 2008
Beam current stabilization utilizing gas feed control loop
AXCELIS TECH INC0 citations52