Inventor

VANDERBERG BO H

US35 patents

⚠️ This page may combine multiple inventors who share the name “VANDERBERG BO H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VANDERBERG BO H

AXCELIS TECH INC

Deflecting acceleration/deceleration gap

Systems and methods for beam angle adjustment in ion implanters

Systems and methods for beam angle adjustment in ion implanters

Ion beam scanning systems and methods for improved ion implantation uniformity

Biased electrostatic deflector

System and method for ion implantation with improved productivity and uniformity

System and method for two-dimensional beam scan across a workpiece of an ion implanter

System for magnetic scanning and correction of an ion beam

Ion beam scanning control methods and systems for ion implantation uniformity

Means to establish orientation of ion beam to wafer and correct angle errors

Scanning systems and methods for providing ions from an ion beam to a workpiece

Beam line architecture for ion implanter

Method and system for ion beam containment using photoelectrons in an ion beam guide

Method and apparatus for ion beam profiling

Plasma electron flood for ion beam implanter

Thin magnetron structures for plasma generation in ion implantation systems

Power supply hardening for ion beam systems

Ion implantation system having beam angle control in drift and deceleration modes

Combined electrostatic lens system for ion implantation

Beam profiling speed enhancement for scanned beam implanters

Ion source

Method and apparatus for measurement of beam angle in ion implantation

Throughput enhancement for scanned beam ion implanters

Ion implanter having combined hybrid and double mechanical scan architecture

Method and system for ion beam profiling

Beam current stabilization utilizing gas feed control loop

Beam angle adjustment in ion implanters

Uniformity of a scanned ion beam

System and method to improve productivity of hybrid scan ion beam implanters

VANDERBERG BO H

System and method for ion implantation with improved productivity and uniformity

Hybrid scanning for ion implantation

Enhanced low energy ion beam transport in ion implantation

EISNER EDWARD C

System and method for ion implantation with improved productivity and uniformity

Beam line design to reduce energy contamination

SIERADZKI MANNY

Ion implanter having combined hybrid and double mechanical scan architecture