Inventor
SCHULZ RONALD N
6 patents
⚠️ This page may combine multiple inventors who share the name “SCHULZ RONALD N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS4648937AMar 10, 1987
Method of preventing asymmetric etching of lines in sub-micrometer range sidewall images transfer
IBM348 citations98
US5128271AJul 7, 1992
High performance vertical bipolar transistor structure via self-aligning processing techniques
IBM71 citations96
US5258318ANov 2, 1993
Method of forming a BiCMOS SOI wafer having thin and thick SOI regions of silicon
IBM58 citations95
US5267418ADec 7, 1993
Confined water fixture for holding wafers undergoing chemical-mechanical polishing
IBM36 citations91
US4475982AOct 9, 1984
Deep trench etching process using CCl2 F2 /Ar and CCl2 F.sub. /O2 RIE
IBM21 citations75