Inventor
TOSHIKAWA KIYOHIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TOSHIKAWA KIYOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKI ELECTRIC IND CO LTD
8 patentsUS6656854B2Dec 2, 2003
Method of forming a low dielectric constant film with tetramethylcyclotetrasiloxane (TMCTS) and LPCVD technique
OKI ELECTRIC IND CO LTD15 citations82
US6627560B1Sep 30, 2003
Method of manufacturing semiconductor device
OKI ELECTRIC IND CO LTD15 citations82
US7381275B2Jun 3, 2008
Apparatus and method for manufacturing semiconductor
OKI ELECTRIC IND CO LTD3 citations61
US7267848B2Sep 11, 2007
Method of fabricating a protective film by use of vacuum ultraviolet rays
OKI ELECTRIC IND CO LTD2 citations61
US6926933B2Aug 9, 2005
Method of manufacturing water-repelling film
OKI ELECTRIC IND CO LTD5 citations61
US6624094B2Sep 23, 2003
Method of manufacturing an interlayer dielectric film using vacuum ultraviolet CVD with Xe2 excimer lamp and silicon atoms
OKI ELECTRIC IND CO LTD4 citations56
US7122486B2Oct 17, 2006
Film forming method
OKI ELECTRIC IND CO LTD0 citations50
US7026257B2Apr 11, 2006
Method of manufacturing low dielectric film by a vacuum ultraviolet chemical vapor deposition
OKI ELECTRIC IND CO LTD0 citations45