Inventor
HANAOKA YUKO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HANAOKA YUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS7402449B2Jul 22, 2008
Integrated micro electro-mechanical system and manufacturing method thereof
HITACHI LTD130 citations98
US6323115B1Nov 27, 2001
Method of forming semiconductor integrated circuit device with dual gate CMOS structure
HITACHI LTD54 citations96
US7325457B2Feb 5, 2008
Sensor and sensor module
HITACHI LTD21 citations92
US7972886B2Jul 5, 2011
Method of manufacturing micro electro mechanical systems device
HITACHI LTD7 citations83
US7670861B2Mar 2, 2010
Controlling stress in MEMS structures
HITACHI LTD10 citations83
US7658109B2Feb 9, 2010
Inertial sensor and manufacturing method of the same
HITACHI LTD18 citations83
US10603689B2Mar 31, 2020
Ultrasonic transducer, method for making same, ultrasonic transducer array, and ultrasonic test apparatus
HITACHI LTD4 citations72
US6864584B2Mar 8, 2005
Semiconductor device
HITACHI LTD4 citations63