Inventor
HO DUSTIN W
US13 patents
⚠️ This page may combine multiple inventors who share the name “HO DUSTIN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7566891B2Jul 28, 2009
Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors
APPLIED MATERIALS INC553 citations98
US7964858B2Jun 21, 2011
Ultraviolet reflector with coolant gas holes and method
APPLIED MATERIALS INC21 citations92
US7777198B2Aug 17, 2010
Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
APPLIED MATERIALS INC29 citations92
US7663121B2Feb 16, 2010
High efficiency UV curing system
APPLIED MATERIALS INC38 citations92
US7410916B2Aug 12, 2008
Method of improving initiation layer for low-k dielectric film by digital liquid flow meter
APPLIED MATERIALS INC9 citations84
US7611996B2Nov 3, 2009
Multi-stage curing of low K nano-porous films
APPLIED MATERIALS INC10 citations83
US7947611B2May 24, 2011
Method of improving initiation layer for low-k dielectric film by digital liquid flow meter
APPLIED MATERIALS INC2 citations63
US7501354B2Mar 10, 2009
Formation of low K material utilizing process having readily cleaned by-products
APPLIED MATERIALS INC6 citations62
US8382885B2Feb 26, 2013
Fluid filtration for substrate processing chamber
APPLIED MATERIALS INC0 citations52
US11114285B2Sep 7, 2021
Apparatus for exhaust cooling
APPLIED MATERIALS INC0 citations48