Inventor

YALAMANCHILI M RAO

US3 patents

⚠️ This page may combine multiple inventors who share the name “YALAMANCHILI M RAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEMC ELECTRONIC MATERIALS

1 patent

US6230720B1May 15, 2001

Single-operation method of cleaning semiconductors after final polishing

MEMC ELECTRONIC MATERIALS81 citations94

APPLIED MATERIALS INC

1 patent

US8002899B2Aug 23, 2011

Method and apparatus for mask pellicle adhesive residue cleaning

APPLIED MATERIALS INC21 citations91

SCP GLOBAL TECHNOLOGIES INC

1 patent

US6726848B2Apr 27, 2004

Apparatus and method for single substrate processing

SCP GLOBAL TECHNOLOGIES INC56 citations91