Inventor

DOH SEUNG YONG

KR2 patents

Patents

2 patents

US7194325B2Mar 20, 2007

System to and method of monitoring condition of process tool

SAMSUNG ELECTRONICS CO LTD10 citations79

US7184910B2Feb 27, 2007

Method of compensating sensor data and evaluating an interlock of an interlock system

SAMSUNG ELECTRONICS CO LTD4 citations59