Inventor
PARK CHUNG HUN
KR5 patents
⚠️ This page may combine multiple inventors who share the name “PARK CHUNG HUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS6858854B2Feb 22, 2005
Method and apparatus for measuring inclination angle of ion beam
SAMSUNG ELECTRONICS CO LTD22 citations89
US7194325B2Mar 20, 2007
System to and method of monitoring condition of process tool
SAMSUNG ELECTRONICS CO LTD10 citations79
US6720533B2Apr 13, 2004
Heater assembly for heating a wafer
SAMSUNG ELECTRONICS CO LTD11 citations72
US6903336B2Jun 7, 2005
Polarity exchanger and ion implanter having the same
SAMSUNG ELECTRONICS CO LTD0 citations46