Inventor
JANG YOO SEOK
KR6 patents
⚠️ This page may combine multiple inventors who share the name “JANG YOO SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS7194325B2Mar 20, 2007
System to and method of monitoring condition of process tool
SAMSUNG ELECTRONICS CO LTD10 citations79
US7184910B2Feb 27, 2007
Method of compensating sensor data and evaluating an interlock of an interlock system
SAMSUNG ELECTRONICS CO LTD4 citations59
US9892983B2Feb 13, 2018
Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same
SAMSUNG ELECTRONICS CO LTD0 citations47