Inventor
LANNING EMILY
US3 patents
Patents
3 patentsUS6682992B2Jan 27, 2004
Method of controlling grain size in a polysilicon layer and in semiconductor devices having polysilicon structures
IBM13 citations90
US7777302B2Aug 17, 2010
Method of controlling grain size in a polysilicon layer and in semiconductor devices having polysilicon structure
IBM5 citations71
US7247924B2Jul 24, 2007
Method of controlling grain size in a polysilicon layer and in semiconductor devices having polysilicon structures
IBM3 citations60